Optimization of electromagnetic fields in holographic lithography using the method of local variations

DOI10.1134/S1064230711060128zbMATH Open1275.93013OpenAlexW2060915044MaRDI QIDQ384675FDOQ384675

Authors: D. Yu. Knyaz'kov 

Publication date: 28 November 2013

Published in: Journal of Computer and Systems Sciences International (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s1064230711060128

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zbMATH Keywords

computer synthesized hologramGabor hologramGibbs effectlight imagesoptimization of electromagnetic fields

Mathematics Subject Classification ID

Control/observation systems governed by functional relations other than differential equations (such as hybrid and switching systems) (93C30)

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