Digital control of interferometric metrology lines
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Publication:397313
DOI10.3166/ejc.13.398-415zbMath1293.93517OpenAlexW1983142919MaRDI QIDQ397313
Publication date: 12 August 2014
Published in: European Journal of Control (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.3166/ejc.13.398-415
Digital control/observation systems (93C62) General topics in optics and electromagnetic theory (78A99)
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