Computational solution of the atomic mixing equations

DOI10.1002/(SICI)1099-1204(199807/08)11:4%3C189::AID-JNM301%3E3.0.CO;2-AMaRDI QIDQ4213656zbMATH OpenOpenAlexFDO

Authors M. Wadsworth, D. G. Armour, Ranjan Badheka, J. A. van Den Berg, Stephen M. Kirkup

Publication date 22 March 1999

Full work available at URL https://doi.org/10.1002/(sici)1099-1204(199807/08)11:4%3C189::aid-jnm301%3E3.0.co;2-a

zbMATH Keywords

atomic mixing equationsfinite element methodFortran codeparticle emissionsecondary ion mass spectrometrysecondary neutral mass spectrometrysurface recession

Mathematics Subject Classification ID

PDEs in connection with quantum mechanics (35Q40) Finite element, Rayleigh-Ritz and Galerkin methods for initial value and initial-boundary value problems involving PDEs (65M60) Packaged methods for numerical algorithms (65Y15) Applications to the sciences (65Z05) Electromagnetic interaction; quantum electrodynamics (81V10)

Recommendations

• Computational solution of the atomic mixing equations: special methods and algorithm of IMPETUS II
• Methods for computer simulation of crystal sputtering
• The inverse solution of the atomic mixing equations by an operator-splitting method
• On the mathematical modelling of multidimensional ion implantation problems

Cites work

• Computational solution of the atomic mixing equations: special methods and algorithm of IMPETUS II

Cited in

(4)

• The inverse solution of the atomic mixing equations by an operator-splitting method
• Solution of inverse diffusion problems by operator-splitting methods
• Computational solution of the atomic mixing equations: special methods and algorithm of IMPETUS II
• Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation

This page was built for publication: Computational solution of the atomic mixing equations

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4213656)