Deformation of silicon - insights from microcompression testing at 25-500^ C

DOI10.1016/J.IJPLAS.2011.05.009MaRDI QIDQ422787zbMATH OpenOpenAlexWikidataFDO

Authors S. Korte, J. S. Barnard, R. J. Stearn, W. J. Clegg

Publication date 18 May 2012

Published in International Journal of Plasticity (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijplas.2011.05.009

zbMATH Keywords

fracturedislocationssiliconmechanical testingceramic material

Mathematics Subject Classification ID

Anelastic fracture and damage (74R20) Experimental work for problems pertaining to mechanics of deformable solids (74-05) Plastic materials, materials of stress-rate and internal-variable type (74C99)

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Cites work

• The role of dislocation walls for nanoindentation to shallow depths

Cited in

(4)

• Stress induced phase transitions in silicon
• Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps
• Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
• Reverse plasticity in single crystal silicon nanospheres

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