Deformation of silicon - insights from microcompression testing at 25-500^ C

DOI10.1016/J.IJPLAS.2011.05.009zbMATH Open1426.74015OpenAlexW2018731566WikidataQ62559035 ScholiaQ62559035MaRDI QIDQ422787FDOQ422787

Authors: S. Korte, J. S. Barnard, R. J. Stearn, W. J. Clegg 

Publication date: 18 May 2012

Published in: International Journal of Plasticity (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijplas.2011.05.009

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zbMATH Keywords

fracturedislocationssiliconmechanical testingceramic material

Mathematics Subject Classification ID

Anelastic fracture and damage (74R20) Experimental work for problems pertaining to mechanics of deformable solids (74-05) Plastic materials, materials of stress-rate and internal-variable type (74C99)

Cites Work

• The role of dislocation walls for nanoindentation to shallow depths

Cited In (4)

• Stress induced phase transitions in silicon
• Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps
• Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
• Reverse plasticity in single crystal silicon nanospheres

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