scientific article; zbMATH DE number 1024672

zbMath0879.70001MaRDI QIDQ4342503

Sergej Fatikow, Ulrich Rembold

Publication date: 22 June 1997

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

temperature sensorsradiation therapylithographyelectro-rheological fluidsmoldingshape memory materialsacceleration micro-sensorselectrostatic micropositionerelectrostatic micropumpgalvano-formingimplantable fiberLIGA techniquemicroactuator pilemicroinstrumentsoptical dosimeterspiezoelectric microatuatorssensor-actuator technology

Mathematics Subject Classification ID

Control/observation systems involving computers (process control, etc.) (93C83) Control of mechanical systems (70Q05) Kinematics of mechanisms and robots (70B15) Introductory exposition (textbooks, tutorial papers, etc.) pertaining to mechanics of particles and systems (70-01)

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Size-dependent nonlinear forced vibration and dynamic stability of electrically actuated micro-plates ⋮ Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force ⋮ Pull-in voltage analysis for an electrostatically actuated extensional microbeam with large deflection

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