scientific article; zbMATH DE number 2052939

zbMATH Open1047.93039MaRDI QIDQ4454565FDOQ4454565

Paul Van den Hof, R. A. de Callafon

Publication date: 8 March 2004

Title of this publication is not available (Why is that?)

Recommendations

• Time-optimal control of wafer stage positioning using simplified models
• scientific article; zbMATH DE number 2052938
• Synchronizing control of reticle and wafer stages using iterative learning control
• Optimal estimation of rational feedforward control via instrumental variables: with application to a wafer stage
• Design framework for high-performance optimal sampled-data control with application to a wafer stage

zbMATH Keywords

system identificationrobust control designservomechanismwafer stagechip manufacturing process

Mathematics Subject Classification ID

System identification (93B30) Design techniques (robust design, computer-aided design, etc.) (93B51) Application models in control theory (93C95)

Cited In (2)

• Title not available (Why is that?)
• Three-stage tracking control for the LED wafer transporting robot

This page was built for publication:

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4454565)