scientific article; zbMATH DE number 2052939

MaRDI QIDQ4454565zbMATHFDO

Authors R. A. de Callafon, Paul Van den Hof

Publication date 8 March 2004

zbMATH Keywords

system identificationrobust control designservomechanismwafer stagechip manufacturing process

Mathematics Subject Classification ID

System identification (93B30) Design techniques (robust design, computer-aided design, etc.) (93B51) Application models in control theory (93C95)

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