scientific article; zbMATH DE number 2052939

zbMATH Open1047.93039MaRDI QIDQ4454565FDOQ4454565

Authors: R. A. de Callafon, Paul Van den Hof 

Publication date: 8 March 2004

Title of this publication is not available (Why is that?)

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zbMATH Keywords

system identificationrobust control designservomechanismwafer stagechip manufacturing process

Mathematics Subject Classification ID

System identification (93B30) Design techniques (robust design, computer-aided design, etc.) (93B51) Application models in control theory (93C95)

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