Multiple response optimization using mixture-designed experiments and desirability functions in semiconductor scheduling

DOI10.1080/0020754021000030402MaRDI QIDQ4460048zbMATH OpenOpenAlexFDO

Authors Russ M. Dabbas, John Fowler, Dwayne A. Rollier, Daniel McCarville

Publication date 18 May 2004

Published in International Journal of Production Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/0020754021000030402

Mathematics Subject Classification ID

Deterministic scheduling theory in operations research (90B35) Discrete location and assignment (90B80)

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Cites work

• A Proof for the Queuing Formula: L = λW

Cited in

(5)

• Rule-based scheduling in wafer fabrication with due date-based objectives
• Optimizing a blend of a mixture slurry in chemical mechanical planarization for advanced semiconductor manufacturing using a posterior preference articulation approach to dual response surface optimization
• Constructing the OGE for promoting tool group productivity in semiconductor manufacturing
• Scheduling experiments on a nulear reactor using mixed integer programming
• A multi-criteria approach for scheduling semiconductor wafer fabrication facilities

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