Analysis of the Air-damping Effect on a Micromachined Beam Resonator

DOI10.1177/1081286503008003006MaRDI QIDQ4467282zbMATH OpenOpenAlexFDO

Authors Chuanli Zhang, Guanshui Xu, Qing Jiang

Publication date 9 June 2004

Published in Mathematics and Mechanics of Solids (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1177/1081286503008003006

Mathematics Subject Classification ID

Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10)

Cites work

• AN EXPANSION FORMULA FOR THE DRAG ON A CIRCULAR CYLINDER MOVING THROUGH A VISCOUS FLUID AT SMALL REYNOLDS NUMBERS
• Finite amplitude vibrations of a neo-Hookean oscillator

Cited in

(16)

• Small-scale Timoshenko beam element
• Thermoelastic vibrations of a Timoshenko microbeam based on the modified couple stress theory
• Thermoelastic damping analysis in microbeam resonators based on Moore-Gibson-Thompson generalized thermoelasticity theory
• Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids
• Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance
• Triangular Mindlin microplate element
• Nonlinear analysis of thermoelastic damping in axisymmetric vibration of micro circular thin-plate resonators
• On the flexural vibrations of generalized thermo-elasto-diffusive thin cantilever beam
• Effects of phase lags on thermoelastic damping in micro-beam resonators
• Thermoelastic damping analysis for a piezothermoelastic nanobeam resonator using DPL model under modified couple stress theory
• Thermoelastic damping of micromechanical resonators based on quintanilla theory
• Vibration analysis of a transversely isotropic piezothermoelastic beam resonators under nonlocal strain gradient theory with DPL model
• The damping in MEMS inertial sensors both at high and low pressure levels
• Analysis of bias DC voltage effect on thermoelastic damping ratio in short nano-beam resonators based on nonlocal elasticity theory and dual-phase-lagging heat conduction model
• Laser-induced vibrations of micro-beams under different boundary conditions
• Stress-dependent thermal relaxation effects in micro-mechanical resonators

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