scientific article; zbMATH DE number 1535825

zbMATH Open0956.34066MaRDI QIDQ4516109FDOQ4516109

Authors: L. A. Sevast'yanov 

Publication date: 26 November 2000

Title of this publication is not available (Why is that?)

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zbMATH Keywords

inverse problems of sputtering theory

Mathematics Subject Classification ID

Inverse problems for functional-differential equations (34K29)

Cited In (5)

• The inverse solution of the atomic mixing equations by an operator-splitting method
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• Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment
• Analysis of problem in mathematical model for shadowed sputtering
• The probability scheme of constructing the mathematical model of shadowed sputtering

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