An iterative method for nonlinear dynamical system of an electrostatically actuated micro-cantilever

DOI10.1016/J.PHYSLETA.2010.06.068zbMATH Open1248.78006OpenAlexW2072151164MaRDI QIDQ455264FDOQ455264

Authors: Y. M. Chen, G. Meng, J. K. Liu 

Publication date: 4 October 2012

Published in: Physics Letters. A (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.physleta.2010.06.068

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zbMATH Keywords

nonlinearMEMSiterative methodmicro-cantilever

Mathematics Subject Classification ID

Preconditioners for iterative methods (65F08) Electro- and magnetostatics (78A30) General theory of infinite-dimensional dissipative dynamical systems, nonlinear semigroups, evolution equations (37L05)

Cites Work

• Nonlinear static and dynamic responses of an electrically actuated viscoelastic microbeam
• Title not available (Why is that?)
• Title not available (Why is that?)
• Iteration procedure for determining approximate solutions to non-linear oscillator equations
• Dynamical analysis and control of microcantilevers
• Micro-rotor dynamics for micro-electro-mechanical systems (MEMS)

Cited In (5)

• A multibody-based dynamic simulation method for electrostatic actuators
• Homotopy analysis method for nonlinear dynamical system of an electrostatically actuated microcantilever
• Lie group analysis of non-linear dynamic of micro structures under electrostatic field
• Nonlinear transient analysis for large-scale dynamics of microelectromechanical systems with the Mor-Pim method
• Adomian decomposition method used for solving nonlinear pull-in behavior in electrostatic micro-actuators

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