Modeling the electrostatic deflection of a MEMS multilayers based actuator
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Publication:474778
DOI10.1155/2013/959232zbMATH Open1299.74137OpenAlexW2115505518WikidataQ59029966 ScholiaQ59029966MaRDI QIDQ474778FDOQ474778
Authors: Hassen M. Ouakad, Muhammad A. Hawwa, Hussain M. Al-Qahtani 
Publication date: 24 November 2014
Published in: Mathematical Problems in Engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1155/2013/959232
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Cites Work
Cited In (8)
- Mathematical modeling of electrostatic MEMS with tailored dielectric properties
- Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification
- Corotational nonlinear finite element formulation and modeling of electrostatically actuated microbeams
- Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS
- On the snap-through buckling analysis of electrostatic shallow arch micro-actuator via meshless Galerkin decomposition technique
- Multimode analysis of the dynamics and integrity of electrically actuated MEMS resonators
- Dynamic analysis of multilayers based MEMS resonators
- A new model for electrostatic MEMS with two free boundaries
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