Mathematical Modeling and Simulation of Thermal Effects in Flexural Microcantilever Resonator Dynamics

DOI10.1177/1077546306061555zbMath1182.74093OpenAlexW2130967005MaRDI QIDQ5188370

G. Nakhaie Jazar

Publication date: 10 March 2010

Published in: Journal of Vibration and Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1177/1077546306061555

zbMATH Keywords

mathematical modelingmicrobeamthermal dampingmicroresonatormicroelectromechanical systems dynamicsmicroelectromechanical systems simulation

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Vibrations in dynamical problems in solid mechanics (74H45) Thermal effects in solid mechanics (74F05) Technical applications of optics and electromagnetic theory (78A55)

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