Application of the NEPSAC Nonlinear Predictive Control Strategy to a Semiconductor Reactor

DOI10.1007/978-3-540-72699-9_42zbMath1223.93039OpenAlexW47524136MaRDI QIDQ5198768

Robin De Keyser, James Donald III

Publication date: 9 August 2011

Published in: Assessment and Future Directions of Nonlinear Model Predictive Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/978-3-540-72699-9_42

zbMATH Keywords

rapid thermal processingflexible productionhighly nonlinear interactive multi-input multi-output system

Mathematics Subject Classification ID

System identification (93B30) Application models in control theory (93C95) Design techniques (robust design, computer-aided design, etc.) (93B51)

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