Reduced order model compensator control of species transport in a CVD reactor

DOI10.1002/1099-1514(200007/08)21:4%3C143::AID-OCA671%3E3.0.CO;2-YMaRDI QIDQ5317787zbMATH OpenOpenAlexFDO

Authors G. M. Kepler, Hien Tran, H. Thomas Banks

Publication date 21 September 2005

Full work available at URL https://doi.org/10.1002/1099-1514(200007/08)21:4%3C143::aid-oca671%3E3.0.co;2-y

zbMATH Keywords

chemical vapour depositionDirichlet boundary controllinear-quadratic controlproper orthogonal decompositionreduced order model

Mathematics Subject Classification ID

Linear-quadratic optimal control problems (49N10) Applications of optimal control and differential games (49N90) Stabilization of systems by feedback (93D15)

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Cites work

• scientific article; zbMATH DE number 49702 (Why is no real title available?)
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• scientific article; zbMATH DE number 53580 (Why is no real title available?)
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• scientific article; zbMATH DE number 3430284 (Why is no real title available?)
• scientific article; zbMATH DE number 3211043 (Why is no real title available?)
• Modeling and control of physical processes using proper orthogonal decomposition

Cited in

(12)

• Reduced order modeling and control of thin film growth in an HPCVD reactor
• Model order reduction for numerical simulation of particle transport based on numerical integration approaches
• Reduced-order compensators via balancing and central control design for a structural control problem
• scientific article; zbMATH DE number 1983961 (Why is no real title available?)
• Proper orthogonal decomposition for flow calculations and optimal control in a horizontal CVD reactor
• Regional observability of a thermal process
• Computation of POD basis functions for fluid flows with Lanczos methods
• Control of laser surface hardening by a reduced-order approach using proper orthogonal decomposition
• A reduced-basis discretization method for chemical vapor deposition reactor simulation
• Control parametrization and finite element method for controlling multi-species reactive transport in a rectangular diffuser unit
• Balanced POD for linear PDE robust control computations
• Reduced-order modeling of the upper tropical Pacific ocean model using proper orthogonal decomposition

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