Friction modeling in linear chemical-mechanical planarization

DOI10.1109/MCS.2008.927333MaRDI QIDQ5375666zbMATH OpenFDO

Authors Jingang Yi

Publication date 14 September 2018

Published in IEEE Control Systems (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1109/MCS.2008.927333

Mathematics Subject Classification ID

Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Friction in solid mechanics (74M10) Classical flows, reactions, etc. in chemistry (92E20) Application models in control theory (93C95)

Cited in

(2)

• Optimizing a blend of a mixture slurry in chemical mechanical planarization for advanced semiconductor manufacturing using a posterior preference articulation approach to dual response surface optimization
• A model for chemical-mechanical polishing of a material surface based on contact mechanics

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