The infrastructure of the timed EOPNs-based multiple-objective real-time scheduling system for 300 mm wafer fab

DOI10.1080/00207540600595793MaRDI QIDQ5428720zbMATH OpenOpenAlexFDO

Authors Huiran Liu, Zhibin Jiang, Richard Y. K. Fung

Publication date 26 November 2007

Published in International Journal of Production Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/00207540600595793

zbMATH Keywords

infrastructuremulti-objectivereal time schedulingextended object-oriented Petri netswafer fab

Mathematics Subject Classification ID

Deterministic scheduling theory in operations research (90B35)

Recommendations

• Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system
• Semiconductor manufacturing scheduling and dispatching
• Rule-based scheduling in wafer fabrication with due date-based objectives
• Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets
• Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system

Cited in

(4)

• A dynamic WIP control strategy for bottlenecks in a wafer fabrication system
• Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system
• Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets
• Semiconductor manufacturing automation

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