The infrastructure of the timed EOPNs-based multiple-objective real-time scheduling system for 300 mm wafer fab

DOI10.1080/00207540600595793zbMATH Open1126.90344OpenAlexW1993584569MaRDI QIDQ5428720FDOQ5428720

Authors: Huiran Liu, Zhibin Jiang, Richard Y. K. Fung 

Publication date: 26 November 2007

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540600595793

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zbMATH Keywords

infrastructuremulti-objectivereal time schedulingextended object-oriented Petri netswafer fab

Mathematics Subject Classification ID

Deterministic scheduling theory in operations research (90B35)

Cited In (4)

• A dynamic WIP control strategy for bottlenecks in a wafer fabrication system
• Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system
• Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets
• Semiconductor manufacturing automation

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