Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
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Publication:608625
DOI10.1007/s10409-005-0051-9zbMath1200.74103MaRDI QIDQ608625
Publication date: 25 November 2010
Published in: Acta Mechanica Sinica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10409-005-0051-9
non-local effects; interfacial shears; non-uniform misfit strain; non-uniform wafer curvatures; stress-curvature relations
74K35: Thin films
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Cites Work
- Bifurcation in isotropic thin film/substrate plates
- Thermoelastic analysis of periodic thin lines deposited on a substrate
- Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
- Geometrically nonlinear stress-deflection relations for thin film/substrate systems
- Thin Film Materials