Model of the coating growth under the conditions of magnetron sputtering deposition
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Publication:619379
DOI10.1007/s11182-010-9391-4zbMath1205.82129OpenAlexW2023814472MaRDI QIDQ619379
Publication date: 24 January 2011
Published in: Russian Physics Journal (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11182-010-9391-4
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