Periodic oscillations in electrostatic actuators under time delayed feedback controller
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Publication:6203094
Abstract: We obtain sufficient conditions for the existence of -periodic solutions for an electrostatic actuator modeled by the time delayed Duffing equation [ ddot{x}(t)+h_{D}(x(t),dot{x}(t))+ x(t) =1- dfrac{e mathcal{V}^2(t,s_{1}(x(t),x_{d}(t),g_1),s_{2}(dot{x}(t),dot{x}_{d}(t),g_2))}{x^2(t)}, ] where and the position and velocity feedback are denoted by [ x_d(t)=x(t-d), quad ext { and } quad dot{x}_d(t)=dot{x}(t-d), ] respectively, the feedback voltage is given by [ mathcal{V}(t,x(t),x_{d}(t),dot{x}(t),dot{x}_{d}(t))=v_{0}+delta v(t)+g_{1}(x(t)-x_{d}(t))+g_{2}(dot{x}(t)-dot{x}_{d}(t)), ] with positive input voltage and . For the damping force we consider two cases, the linear one, i.e., and the squeeze film type, i.e., . Our approach can be applied to a large class of delayed Li'enard equations that governs the motion of several MEMS devices, including the comb-drive finger actuator and the torsional actuator.
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