Gaussian process modeling for engineered surfaces with applications to Si wafer production

DOI10.1002/STA4.26MaRDI QIDQ6537848zbMATH OpenFDO

Authors Matthew Plumlee, Ran Jin, V. Roshan Joseph, Jianjun Shi

Publication date 14 May 2024

Published in Stat (Search for Journal in Brave)

zbMATH Keywords

statistical process controlquality controlfunctional responsedesigned experiment

Mathematics Subject Classification ID

Statistics (62-XX)

Cites work

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