Gaussian process modeling for engineered surfaces with applications to Si wafer production

DOI10.1002/STA4.26MaRDI QIDQ6537848FDOQ6537848

Authors: Matthew Plumlee, Ran Jin, V. Roshan Joseph, Jianjun Shi 

Publication date: 14 May 2024

Published in: Stat (Search for Journal in Brave)

zbMATH Keywords

statistical process controlquality controlfunctional responsedesigned experiment

Mathematics Subject Classification ID

Statistics (62-XX)

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