Deep learning for nonlinear characterization of electrostatic vibrating beam MEMS

DOI10.1142/S0218127423300380MaRDI QIDQ6539003zbMATH OpenFDO

Authors Basil Alattar, Mehdi Ghommem, Vladimir Evgenievich Puzyrev

Publication date 14 May 2024

Published in International Journal of Bifurcation and Chaos in Applied Sciences and Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1142/S0218127423300380

zbMATH Keywords

bifurcationdeep learninghysteresismotion-induced currentnonlinear dynamics

Mathematics Subject Classification ID

Artificial neural networks and deep learning (68T07) Neural and heuristic methods applied to problems in optics and electromagnetic theory (78M32)

Cites work

• Deep learning for gas sensing using MOFs coated weakly-coupled microbeams
• Deep learning for simultaneous measurements of pressure and temperature using arch resonators
• DYNAMICS OF ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEMS: SINGLE DEVICE AND ARRAYS OF DEVICES
• Fluid sensing using microcantilevers: from physics-based modeling to deep learning
• On the chaotic vibrations of electrostatically actuated arch micro/nano resonators: a parametric study

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