Deep learning for nonlinear characterization of electrostatic vibrating beam MEMS
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Publication:6539003
DOI10.1142/S0218127423300380zbMATH Open1546.78014MaRDI QIDQ6539003FDOQ6539003
Authors: Basil Alattar, Mehdi Ghommem, Vladimir Evgenievich Puzyrev 
Publication date: 14 May 2024
Published in: International Journal of Bifurcation and Chaos in Applied Sciences and Engineering (Search for Journal in Brave)
Artificial neural networks and deep learning (68T07) Neural and heuristic methods applied to problems in optics and electromagnetic theory (78M32)
Cites Work
- DYNAMICS OF ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEMS: SINGLE DEVICE AND ARRAYS OF DEVICES
- Fluid sensing using microcantilevers: from physics-based modeling to deep learning
- Deep learning for simultaneous measurements of pressure and temperature using arch resonators
- On the chaotic vibrations of electrostatically actuated arch micro/nano resonators: a parametric study
- Deep learning for gas sensing using MOFs coated weakly-coupled microbeams
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