Errors in measuring the linear sizes of structures when detecting backscattered electrons in an SEM
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Publication:664011
DOI10.3103/S1062873810070208zbMath1236.82153OpenAlexW1989366279MaRDI QIDQ664011
T. N. Savitskaya, V. V. Kaz'miruk
Publication date: 28 February 2012
Published in: Bulletin of the Russian Academy of Sciences: Physics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.3103/s1062873810070208
Technical applications of optics and electromagnetic theory (78A55) Statistical mechanics of nanostructures and nanoparticles (82D80)
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