Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock

DOI10.1007/S00707-024-04116-5MaRDI QIDQ6661908zbMATH OpenFDO

Authors Ahmed Hashim Kareem, Mohammad Fathalilou, Ghader Rezazadeh

Publication date 13 January 2025

Published in Acta Mechanica (Search for Journal in Brave)

Mathematics Subject Classification ID

Mechanics of deformable solids (74-XX) Fluid mechanics (76-XX)

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