Simultaneous potential and circuit solutions for two-dimensional bounded plasma simulation codes
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Publication:676333
DOI10.1006/jcph.1996.5591zbMath0903.76060OpenAlexW2022650975MaRDI QIDQ676333
Publication date: 6 May 1997
Published in: Journal of Computational Physics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1006/jcph.1996.5591
Poisson solverdually excited capacitively coupled RF dischargeexternal lumped circuit elementsLaplace solverplasma processing reactorsolver decomposition
Finite difference methods applied to problems in fluid mechanics (76M20) Ionized gas flow in electromagnetic fields; plasmic flow (76X05)
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