Optimization of slot-coating processes: minimizing the amplitude of film-thickness oscillation

DOI10.1007/S10665-010-9440-6MaRDI QIDQ695428zbMATH OpenOpenAlexFDO

Authors Eduardo Pérez, Marcio S. Carvalho

Publication date 21 December 2012

Published in Journal of Engineering Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s10665-010-9440-6

zbMATH Keywords

optimizationtransient responsefinite-element methodfree-surface flowslot coating

Mathematics Subject Classification ID

Finite element methods applied to problems in fluid mechanics (76M10) Thin fluid films (76A20) Flow control and optimization for incompressible viscous fluids (76D55)

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Cites work

• A computational study of the effect of viscoelasticity on slot coating flow of dilute polymer solutions
• A new outflow boundary condition
• A study of viscoelastic free surface flows by the finite element method: Hele--Shaw and slot coating flows.
• Discretization of free surface flows and other moving boundary problems
• Slot coating of mildly viscoelastic liquids

Cited in

(3)

• Development of a new simulation model of spin coating process and its application to optimize the 450 mm wafer coating process
• Mid-gap invasion in two-layer slot coating
• Optimization problems in the estimation of parameters of thin films and the elimination of the influence of the substrate.

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