Lumped parameter analytic modeling and behavioral simulation of a 3-DOF MEMS gyro-accelerometer

DOI10.1007/S10409-015-0512-8MaRDI QIDQ739990zbMATHOpenAlexFDO

Authors Payal Verma, Sandeep K. Arya, Ram Gopal

Publication date 11 August 2016

Published in Acta Mechanica Sinica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s10409-015-0512-8

zbMATH Keywords

microelectromechanical systems (MEMS)transient modelgyro-accelerometergyro-accelerometer modelmultimeasurement system

Mathematics Subject Classification ID

Motion of the gyroscope (70E05)

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Cited in

(1)

• A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

Describes a project that uses

Uses Software

• Matlab
• Simulink

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