Lumped parameter analytic modeling and behavioral simulation of a 3-DOF MEMS gyro-accelerometer
From MaRDI portal
Publication:739990
DOI10.1007/S10409-015-0512-8zbMATH Open1342.70015OpenAlexW2197124995MaRDI QIDQ739990FDOQ739990
Authors: Payal Verma, Sandeep K. Arya, Ram Gopal 
Publication date: 11 August 2016
Published in: Acta Mechanica Sinica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10409-015-0512-8
Recommendations
- Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation
- A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective
- Self-oscillation loop design and measurement for an MEMS resonant accelerometer
- Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)
- Oscillatory behavior of an electrostatically actuated microcantilever gyroscope
microelectromechanical systems (MEMS)transient modelgyro-accelerometergyro-accelerometer modelmultimeasurement system
Cited In (1)
Uses Software
This page was built for publication: Lumped parameter analytic modeling and behavioral simulation of a 3-DOF MEMS gyro-accelerometer
Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q739990)
