BaF₂ for microlithography applications: modeling, simulation and optimization of the crystal growth process

DOI10.1016/J.CAM.2006.04.020MaRDI QIDQ880185zbMATH OpenOpenAlexFDO

Authors Rainer Backofen, Angel Ribalta, Axel Voigt, Dirk Wulff-Molder

Publication date 11 May 2007

Published in Journal of Computational and Applied Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cam.2006.04.020

zbMATH Keywords

heat and mass transferheat radiationprocess optimization

Mathematics Subject Classification ID

Finite element methods applied to problems in solid mechanics (74S05) Crystalline structure (74E15) Optimization problems in thermodynamics and heat transfer (80M50) Finite element, Galerkin and related methods applied to problems in thermodynamics and heat transfer (80M10)

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Cites work

• scientific article; zbMATH DE number 988162 (Why is no real title available?)
• Numerical Optimization
• Simplified \(P_N\) approximations to the equations of radiative heat transfer and applications
• The radiosity equation for solving global heat transfer in industrial furnaces

Cited in

(2)

• Numerical simulation of GaN single-crystal growth process in ammonothermal autoclave - effects of baffle shape
• Model based optimization of some growth process parameters of a Nd:YAG cylindrical bar grown in a vacuum by the edge-defined film-fed growth method

Describes a project that uses

Uses Software

• crysvun++

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