BaF₂ for microlithography applications: modeling, simulation and optimization of the crystal growth process

DOI10.1016/J.CAM.2006.04.020MaRDI QIDQ880185zbMATH OpenOpenAlexFDO

Authors Rainer Backofen, Angel Ribalta, Axel Voigt, Dirk Wulff-Molder

Publication date 11 May 2007

Published in Journal of Computational and Applied Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cam.2006.04.020

zbMATH Keywords

heat and mass transferheat radiationprocess optimization

Mathematics Subject Classification ID

Crystalline structure (74E15) Finite element methods applied to problems in solid mechanics (74S05) Finite element, Galerkin and related methods applied to problems in thermodynamics and heat transfer (80M10) Optimization problems in thermodynamics and heat transfer (80M50)

Review text

The authors model and simulate numerically the crystal growth process of \(\text{BaF}_2\) in a specific industrial process called Vertical Gradient Freeze (VGF). At the beginning of the paper the authors discuss the main industrial motivation which is to decrease the size of integrated circuits. This applications requires lenses with specific optical properties and one method to obtain this is VGF. The main mathematical model is discussed by reviewing the governing equations. Then an adaptive FEM approach is described. The authors then describe the interface to a commercial software package and apply an external optimization algorithm to process the model. Finally the authors use a modified quasi-Newton method to propose an improvement of an industrial VGF growth process of \(\text{BaF}_2\).

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Cites work

• scientific article; zbMATH DE number 988162 (Why is no real title available?)
• Numerical Optimization
• Simplified \(P_N\) approximations to the equations of radiative heat transfer and applications
• The radiosity equation for solving global heat transfer in industrial furnaces

Cited in

(2)

• Numerical simulation of GaN single-crystal growth process in ammonothermal autoclave - effects of baffle shape
• Model based optimization of some growth process parameters of a Nd:YAG cylindrical bar grown in a vacuum by the edge-defined film-fed growth method

Describes a project that uses

Uses Software

• crysvun++

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