Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)

DOI10.1007/S00291-007-0093-4zbMATH Open1193.90228OpenAlexW2111675018MaRDI QIDQ991812FDOQ991812

Authors: Shu-Hsing Chung, Chun-Ying Huang, Amy Lee 

Publication date: 8 September 2010

Published in: OR Spectrum (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00291-007-0093-4

Recommendations

• Using Constraint Satisfaction Approach to Solve the Capacity Allocation Problem for Photolithography Area
• Capacity allocation with machine duplication in semiconductor manufacturing
• A capacity allocation problem with integer side constraints
• Short-term capacity allocation problem with tool and setup constraints
• Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants

zbMATH Keywords

linear programmingheuristicmachine dedicationphotolithography areaprocess window

Mathematics Subject Classification ID

Linear programming (90C05) Applications of mathematical programming (90C90)

Cites Work

• A capacity allocation problem with integer side constraints

Cited In (2)

• Using Constraint Satisfaction Approach to Solve the Capacity Allocation Problem for Photolithography Area
• A simulation optimization framework to solve stochastic flexible job-shop scheduling problems -- case: semiconductor manufacturing

This page was built for publication: Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q991812)