Simulation and model reduction methods for an RF plasma glow discharge

DOI10.1006/JCPH.2001.6808MaRDI QIDQ5951793zbMATH OpenOpenAlexFDO

Authors Yi-hung Lin, Raymond A. Adomaitis

Publication date 2001

Published in Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL https://semanticscholar.org/paper/0770ab4f4d33261c284ef9b3a0530ab46c61601e

zbMATH Keywords

collocationglobal basis functionsglow dischargemodel reductionplasma processingpseudospectral methods

Mathematics Subject Classification ID

Spectral methods applied to problems in fluid mechanics (76M22) Ionized gas flow in electromagnetic fields; plasmic flow (76X05)

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Cites work

• A Computational Framework for Boundary-Value Problem Based Simulations
• A Practical Guide to Pseudospectral Methods
• A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges
• An application of inertial manifold theory to boundary stabilization of semilinear diffusion systems
• An efficient method of solving the Navier-Stokes equations for flow control
• Finite-dimensional control of parabolic PDE systems using approximate inertial manifolds
• scientific article; zbMATH DE number 3640828 (Why is no real title available?)
• scientific article; zbMATH DE number 274399 (Why is no real title available?)
• Low-dimensional models for complex geometry flows: Application to grooved channels and circular cylinders
• Optimal low-dimensional dynamical approximations
• Turbulence and the dynamics of coherent structures. I. Coherent structures
• Turbulence, Coherent Structures, Dynamical Systems and Symmetry

Cited in

(7)

• On accuracy and performance of high-order finite volume methods in local mean energy model of non-thermal plasmas
• Two-dimensional fluid simulation of plasma reactors for the immobilization of krypton
• Simulation of RF plasma flowing at low pressure
• scientific article; zbMATH DE number 5815911 (Why is no real title available?)
• Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations
• A reduced-basis discretization method for chemical vapor deposition reactor simulation
• A numerical method to simulate radio-frequency plasma discharges

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Uses Software

• MWRtools

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