A BEM technique for free-molecule flows in high frequency MEMS resonators
type: Item
instance of: scholarly article
title: A BEM technique for free-molecule flows in high frequency MEMS resonators
zbMATH Open document ID: 1244.76043
published in: Engineering Analysis with Boundary Elements
publication date: 2012-08-07T00:00:00Z
Mathematics Subject Classification ID: 76M15
Mathematics Subject Classification ID: 76P05
zbMATH DE Number: 6063802
zbMATH Keywords: MEMS
zbMATH Keywords: free-molecule flow
zbMATH Keywords: dissipation
MaRDI profile type: MaRDI publication profile
full work available at URL: j.enganabound.2008.08.012
OpenAlex ID: W2048968263
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DOI: 10.1016/J.ENGANABOUND.2008.08.012
author: A. Frangi
description: scientific article; zbMATH DE number 6063802