Model Reduction for Sliding Mode Control of Rapid Thermal Processing System (Q3193244)

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Model Reduction for Sliding Mode Control of Rapid Thermal Processing System
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    Model Reduction for Sliding Mode Control of Rapid Thermal Processing System (English)
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    16 October 2015
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    model reduction
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    small-order model
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    sliding mode control
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    rapid thermal processing system
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    spectrum
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