Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges (Q548981)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges |
scientific article |
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Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges (English)
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30 June 2011
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PIC method
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RF discharge
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mass alteration
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