Study on thermal elastic damping of micro-scale semiconductor beams (Q6576369)

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scientific article; zbMATH DE number 7884721
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Study on thermal elastic damping of micro-scale semiconductor beams
scientific article; zbMATH DE number 7884721

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    Study on thermal elastic damping of micro-scale semiconductor beams (English)
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    22 July 2024
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    analytical solution
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    carrier density
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    complex frequency method
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    inverse quality factor
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    vibration equation
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