A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (Q850043)

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A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates
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    A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (English)
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    15 November 2006
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    thin films
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    plasticity
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    small-scale yielding
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    strain hardening
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    MEMS
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