Surface AcousticWave Linear Motor Using Glass Substrate

DOI10.1007/978-1-4020-9438-5_21MaRDI QIDQ3565557zbMATH OpenOpenAlexFDO

Authors Hiroyuki Kotani, Masaya Takasaki, Takeshi Mizuno

Publication date 4 June 2010

Published in Motion and Vibration Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/978-1-4020-9438-5_21

zbMATH Keywords

surface acoustic wave (SAW) linear motorultrasonic motor

Mathematics Subject Classification ID

Application models in control theory (93C95)

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