Theory of rf-driven plasma sheath

DOI10.1088/0031-8949/74/6/015MaRDI QIDQ3653639zbMATH OpenOpenAlexFDO

Authors

Publication date 28 December 2009

Published in Physica Scripta (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1088/0031-8949/74/6/015

zbMATH Keywords

kinetic theoryplasma confinementplasma physicsplasma wavesplasma-wall interaction

Mathematics Subject Classification ID

Statistical mechanics of plasmas (82D10)

Recommendations

• The Radio-Frequency Driven Plasma Sheath: Asymptotics and Analysis
• Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges
• Monte Carlo simulation of radio-frequency plasmas in N2
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Cited in

(6)

• Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges
• The Radio-Frequency Driven Plasma Sheath: Asymptotics and Analysis
• Vlasov description of space charge inversion close to the wall in a collisionless plasma sheath at grazing incidence of the magnetic field
• RF-transpond: a 1D coupled cold plasma wave and plasma transport model for ponderomotive force driven density modification parallel to \(\mathbf{B_0}\)
• A finite element procedure for radio-frequency sheath-plasma interactions in the ion cyclotron range of frequencies
• The effect of sheath on plasma momentum transport to an electrically biased surface

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