Two-dimensional adaptive simulation of dopant diffusion in silicon

DOI10.1007/S007910000045MaRDI QIDQ5933368zbMATH OpenOpenAlexFDO

Authors Jens Lang, W. Merz

Publication date 4 June 2001

Published in Computing and Visualization in Science (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s007910000045

Mathematics Subject Classification ID

Statistical mechanics of semiconductors (82D37)

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