Two-step decision and control of pressure in LED wafer pasting process

DOI10.13195/J.KZYJC.2014.1952MaRDI QIDQ2994145zbMATH OpenFDO

Authors Zuoxun Wang, De Xu

Publication date 10 August 2016

Full work available at URL https://doi.org/10.13195/J.KZYJC.2014.1952

zbMATH Keywords

fuzzy decision and controlpressure controlsemi-tensor product

Mathematics Subject Classification ID

Production models (90B30) Fuzzy control/observation systems (93C42)

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Cited in

(1)

• Pressure adjusting algorithm command for a chamber

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