Uncertainty quantification of MEMS using a data-dependent adaptive stochastic collocation method

DOI10.1016/J.CMA.2011.06.010MaRDI QIDQ660314zbMATH OpenOpenAlexFDO

Authors Aravind Alwan, N. R. Aluru

Publication date 1 February 2012

Published in Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cma.2011.06.010

zbMATH Keywords

uncertainty quantificationstochastic collocationmicroelectromechanical systems (MEMS)adaptive analysishybrid electrothermomechanical (ETM) actuation

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Electromagnetic effects in solid mechanics (74F15)

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Cited in

(4)

• A domain adaptive stochastic collocation approach for analysis of MEMS under uncertainties
• Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS
• Improved statistical models for limited datasets in uncertainty quantification using stochastic collocation
• A data-driven stochastic collocation approach for uncertainty quantification in MEMS

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