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Latest revision as of 09:53, 5 March 2024

scientific article
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English
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scientific article

    Statements

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    25 September 2002
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    chemical vapor deposition
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    wet etching
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    laser Doppler velocimetry
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    microfluidics
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    plastics
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    linearly elastic deflection models
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    low Reynolds number flows
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    electrokinetics
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    photolithography
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    thermal oxidation
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    sol-gel deposition
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    physical dry etching
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    chemical dry etching
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    pattern transfer techniques
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    optical Doppler tomography
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    particle image velocimetry
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    external flow control
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    velocity sensors
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    shear stress sensors
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    microair vehicles
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    internal flow control
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    microvalves
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    micropumps
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    microflow sensors
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