scientific article

zbMath1022.76002MaRDI QIDQ3149259

Steven T. Wereley, Nam-Trung Nguyen

Publication date: 25 September 2002

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

chemical vapor depositionparticle image velocimetrymicrofluidicselectrokineticslow Reynolds number flowslaser Doppler velocimetryphotolithographythermal oxidationplasticschemical dry etchingexternal flow controlinternal flow controllinearly elastic deflection modelsmicroair vehiclesmicroflow sensorsmicropumpsmicrovalvesoptical Doppler tomographypattern transfer techniquesphysical dry etchingshear stress sensorssol-gel depositionvelocity sensorswet etching

Mathematics Subject Classification ID

Reaction effects in flows (76V05) Research exposition (monographs, survey articles) pertaining to fluid mechanics (76-02) Foundations, constitutive equations, rheology, hydrodynamical models of non-fluid phenomena (76A99)

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