Publication:3149259

zbMath1022.76002MaRDI QIDQ3149259

Steven T. Wereley, Nam-Trung Nguyen

Publication date: 25 September 2002

zbMATH Keywords

chemical vapor deposition; particle image velocimetry; microfluidics; electrokinetics; low Reynolds number flows; laser Doppler velocimetry; photolithography; thermal oxidation; plastics; chemical dry etching; external flow control; internal flow control; linearly elastic deflection models; microair vehicles; microflow sensors; micropumps; microvalves; optical Doppler tomography; pattern transfer techniques; physical dry etching; shear stress sensors; sol-gel deposition; velocity sensors; wet etching

Mathematics Subject Classification ID

76V05: Reaction effects in flows

76-02: Research exposition (monographs, survey articles) pertaining to fluid mechanics

76A99: Foundations, constitutive equations, rheology, hydrodynamical models of non-fluid phenomena

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