scientific article; zbMATH DE number 1807391
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Publication:3149259
chemical dry etchingchemical vapor depositionelectrokineticsexternal flow controlinternal flow controllaser Doppler velocimetrylinearly elastic deflection modelslow Reynolds number flowsmicroair vehiclesmicroflow sensorsmicrofluidicsmicropumpsmicrovalvesoptical Doppler tomographyparticle image velocimetrypattern transfer techniquesphotolithographyphysical dry etchingplasticsshear stress sensorssol-gel depositionthermal oxidationvelocity sensorswet etching
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