No label defined (Q3149259)
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scientific article; zbMATH DE number 1807391
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| English | No label defined |
scientific article; zbMATH DE number 1807391 |
Statements
25 September 2002
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chemical vapor deposition
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wet etching
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laser Doppler velocimetry
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microfluidics
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plastics
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linearly elastic deflection models
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low Reynolds number flows
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electrokinetics
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photolithography
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thermal oxidation
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sol-gel deposition
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physical dry etching
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chemical dry etching
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pattern transfer techniques
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optical Doppler tomography
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particle image velocimetry
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external flow control
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velocity sensors
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shear stress sensors
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microair vehicles
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internal flow control
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microvalves
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micropumps
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microflow sensors
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0.99999976
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0.88808686
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0.8636986
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