Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication (Q5375866): Difference between revisions
From MaRDI portal
Created a new Item |
Set profile property. |
||
| (One intermediate revision by one other user not shown) | |||
| Property / MaRDI profile type | |||
| Property / MaRDI profile type: Publication / rank | |||
Normal rank | |||
| links / mardi / name | links / mardi / name | ||
Latest revision as of 21:04, 5 March 2024
scientific article; zbMATH DE number 6937363
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication |
scientific article; zbMATH DE number 6937363 |
Statements
Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication (English)
0 references
14 September 2018
0 references
