Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication
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Publication:5375866
DOI10.1109/MCS.2013.2279474zbMath1395.93433MaRDI QIDQ5375866
Publication date: 14 September 2018
Published in: IEEE Control Systems (Search for Journal in Brave)
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