Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication (Q5375866)
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scientific article; zbMATH DE number 6937363
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| English | Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication |
scientific article; zbMATH DE number 6937363 |
Statements
Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication (English)
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14 September 2018
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