Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (Q999955): Difference between revisions

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Latest revision as of 20:52, 19 March 2024

scientific article
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Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in
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    Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (English)
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    4 February 2009
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    electromechanical coupling
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    finite element
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    micro-systems
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    dynamics
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    pull-in
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