Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in

DOI10.1016/J.NA.2005.01.055MaRDI QIDQ999955zbMATHOpenAlexFDO

Authors V. Rochus, Daniel Rixen, J.-C. Golinval

Publication date 4 February 2009

Published in Nonlinear Analysis. Theory, Methods \& Applications. Series A: Theory and Methods (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.na.2005.01.055

zbMATH Keywords

dynamicsfinite elementelectromechanical couplingmicro-systemspull-in

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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Cited in

(20)

• About the synchronization of MEMs
• A domain decomposition technique applied to the solution of the coupled electro-mechanical problem
• A continuum-based modeling of MEMS devices for estimating their resonant frequencies
• Electromechanical dynamic buckling phenomenon in symmetric electric fields actuated microbeams considering material damping
• Comparison of pull-in voltages in MEMS using 3D FEM and analytical approaches
• Thermoelastic vibrations of a Timoshenko microbeam based on the modified couple stress theory
• Effect of geometric nonlinearity on dynamic pull-in behavior of coupled-domain microstructures based on classical and shear deformation plate theories
• A hybrid finite element strategy for the simulation of MEMS structures
• A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers
• Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges
• A palette of methods for computing pull-in curves for numerical models of microsystems
• Coupled mechanical‐electrostatic FE‐BE analysis with FMM acceleration
• The oscillatory behavior, static and dynamic analyses of a micro/nano gyroscope considering geometric nonlinearities and intermolecular forces
• Nonlinear analysis of electrostatically actuated diaphragm-type micropumps
• Monolithic modelling of electro-mechanical coupling in micro-structures
• Effect of geometrical nonlinearity on MEMS thermoelastic damping
• DYNAMICS OF ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEMS: SINGLE DEVICE AND ARRAYS OF DEVICES
• Emergent electromechanical coupling of electrets and some exact relations -- the effective properties of soft materials with embedded external charges and dipoles
• A multibody-based dynamic simulation method for electrostatic actuators
• Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations

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