A continuum-based modeling of MEMS devices for estimating their resonant frequencies
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Publication:2638133
DOI10.1016/j.cma.2008.07.017zbMath1194.74140MaRDI QIDQ2638133
Publication date: 14 September 2010
Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.cma.2008.07.017
74H45: Vibrations in dynamical problems in solid mechanics
74F15: Electromagnetic effects in solid mechanics
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