A continuum-based modeling of MEMS devices for estimating their resonant frequencies (Q2638133)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A continuum-based modeling of MEMS devices for estimating their resonant frequencies |
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A continuum-based modeling of MEMS devices for estimating their resonant frequencies (English)
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14 September 2010
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electric stiffness
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mesh motion
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electric field
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finite element method
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total Lagrangian
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