Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (Q999955)
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scientific article; zbMATH DE number 5502788
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| English | Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in |
scientific article; zbMATH DE number 5502788 |
Statements
Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in (English)
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4 February 2009
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electromechanical coupling
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finite element
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micro-systems
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dynamics
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pull-in
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0.8050075173377991
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0.7983033657073975
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0.7962111830711365
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0.7898845672607422
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0.753250777721405
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